BATCHSPRAY Acid (SAT’s)
General features Throughput up to 150 wph: Intelligent wafer handling meets experienced wafer processing. Semi-automated: Once the batch is transferred to the chamber, the process flow is automated through several…
BATCHSPRAY Solvent (SST’s)
General features Non-uniformity <1%: Controlled wafer rotation combined with smart chemical spray gain leads to excellent uniformity. Throughput up to 150 wph: Intelligent wafer handling meets experienced wafer processing. Semi-automated:…
Vertical Laminar Flow Manual Wet Bench
Removable work surface Material Options: 304L or 316L stainless steel, FM-approved PVC-C, or white polypropylene Purged electrical compartments Exhaust failure alarm Emergency power off Welded sealed secondary containment Seismic anchors…
Wet Bench
High Throughput: Large‑volume platforms with automated multitasking abilities Precise Control: Local data logging, concentration control, and monitoring Minimal Footprint: The most compact yet efficient wet processing benches available Quality Compliant:…
Rear Linear Automated Wet Bench
Rear Linear Automated Wet Bench Overview The Rear Linear Automated Wet Bench (RLA) is engineered for automated, semi-automated, or multitasking operations, offering flexibility in wafer handling with a range of…
Front Linear Automated Wet Bench
Front Linear Automated Wet Bench Overview The Front Linear Automated (FLA) can run up to two cassettes/50 wafers. This chemical wet bench allows for accurate process control, high throughput, and…
Tigress Automated Wet Bench
Tigress Automated Wet Bench Overview As one of JST’s industry-leading automated wet benches, the Tigress Automated Wet Bench provides advanced automation in a compact footprint at a competitive price. It automates…
3-Axis Compact Automated Wet Bench
3-Axis Compact Automated Wet Bench Overview This powerful wet bench supports up to 200mm product size processing and is compatible with GaAs, InP, and other compound semiconductor or silicon substrates.…
Automated Wet Bench
The Automated Wet Bench: Consistently Efficient Results JST designs, manufactures, and services custom automated wet processing equipment that generates high-throughput and repeatable results with multi-tasking or cascading process scheduling…
IPA Dryers
JST offers two vapor drying systems: Closed Loop Vapor (CLV) IPA Vapor Dryer: The vapor is remotely generated and introduced into the chamber, mixing with water and displacing it. It’s…
Premium EPI Foreline Tube Cleaner
Designed for high-performance environments, this wet bench handles acids, bases, oxidizers, and other cleaning chemicals with ease. It features a dual-contained exhaust system, ensuring secure operation in cleanroom conditions. Its…
Solvent Photo-Bowl Cleaner
FAQs 1. Can it clean components beyond photo-bowls?Yes, it accommodates various track system parts. 2. Is the workspace fume-exhausted?Absolutely—it's fully ventilated for solvent safety. 3. Does it support flammable solvents?Yes,…
Horizontal Quartz Diffusion Tube Cleaner
FAQs 1. What materials can this system clean?Quartz tubes, cassettes, and other semiconductor-related parts. 2. How does it ensure uniform cleaning?By rotating parts during chemical immersion. 3. Is chemical usage…
Semiconductor Parts Cleaning Systems
JST collaborates closely with customers to provide innovative cleaning solutions for complex parts, ensuring reduced chemical usage, a smaller equipment footprint, and efficient automation that drives the highest return on…
Batchspray Four
General features Solvent replacement: Replace your solvents for polymer removal after dry etching. H2SO4 & H2O2 replacement: Replace sulfuric acid & hydrogen peroxide for RCA clean. FSI replacement: Replace FSI…
Ultrasonic & Megasonic Tanks
Standard Features Material Options: natural polypropylene, PVDF, PFA, quartz, or 316L stainless steel PLC controlled with color touchscreen Programmable temperature, recirculation flow rate, and process time Full liquid level detection…
Ultrasonic & Megasonic Energy Meters
Specifications Energy Range0 to 255 w/in2 (w/gal*)Energy Accuracy ±0.2% w/in2 (w/gal)Energy Display Resolution1.0 w/in2 (w/gal)Frequency Range0 to 500 kHzFrequency Accuracy±1.0 kHzFreq. Display Resolution0.1 kHzDisplayCustom LCDMemory100 sets: loc., date, time, avg., max,min, DT, freq.OutputComputer or Serial…
Tigress XL Automated Wet Bench
Tigress XL Automated Wet Bench The Tigress XL Automated Wet Bench offers a low-cost, adaptable, compact chemical wet bench platform. With minimum floor space and lower exhaust requirements, it delivers…
Automated Parts Cleaning System
The system supports semi-automated and fully automated configurations, featuring JST MANUFACTURING’s Front Linear Transfer, Rear Mounted Linear Transfer, or Overhead Linear Transfer options. These mechanisms ensure fast, repeatable part movement…
Closed Loop Vapor Dryer (CLV)
Closed Loop Vapor Dryer (CLV) Overview In the CLV Dryer, IPA vapor is remotely generated and introduced into the drying chamber, where it displaces water. The vapor is then…
Surface Tension Gradient Marangoni Dryer
FM4910 PVC shell and containment FM4910 PVDF process chamber No IPA vapor present during load/unload Ambient IPA vapor generator with low IPA usage Ionized N2 to minimize surface charging of…
Surface Tension Gradient Marangoni Dryer
Surface Tension Gradient (Marangoni) Dryer Overview By applying the Marangoni Dryer Principle, it ensures the lowest particle drying of hydrophobic or hydrophilic wafers without any moving parts, reducing the damage…
Vapor Degreaser
Designed with a vapor-condensing collar, this system reduces chemical loss while maximizing cost-efficiency. The Vapor Degreaser automatically positions parts for optimal exposure to condensed IPA vapor, ensuring thorough cleaning. Once…
Overhead Linear Automated Wet Bench
Material Options: 304L stainless steel, 316L stainless steel, FM-approved PVC-C, or white polypropylene Internal stainless steel frames isolated from process chemistry Designed with a programmable logic controller (PLC) in addition…
Vapor Degreaser
Material Options: 304L stainless steel with 316L stainless steel wetted components Vapor-condensing collar to minimize evaporation and chemical usage Automated chamber lid Explosion-proof, servo motor driven, vertical product automation Removable…
Vertical Quartz Diffusion Tube Cleaner
Lab professionals benefit from ergonomic front-loading access, a self-monitoring control system, and integrated recirculation with filtration all contributing to a safe and controlled operation. Built with a purged chemical spray…
Chemical Waste Unit (CWU) Solvent, Acid or Base
Up to 3ea 30 or 55 gallon drums Solvent CWU Material Options: Dual Wall 304L Stainless Steel or 316L Stainless Steel Acid or Base CWU Material Options: FM Approved PVC-C…
pH Neutralization System
It offers a batch collection reservoir which can be located inside of a standalone system or integrated within a wet bench at the point of use. Chemistries are drained into…
Chemical Dispensing Unit
Chemical Dispensing Unit Overview Acid and base chemical dispensing units include glove ports for changing drums without opening the cabinet, isolating personnel from hazardous chemicals and fumes. Solvent cabinets are…
Tear-Down Workstation
This unit includes a sealed, exhausted chamber to prevent chemical exposure during teardown and rebuild tasks. Its rear exhaust plenum draws hazardous fumes away from technicians, while a counterbalanced face…
Tear-Down Workstation
304L stainless steel construction Clear counterbalanced face shield/sash Welded sealed work surface 5 gallon HEPA vacuum cleaner Two nitrogen hand sprays Nitrogen purged electrical compartment Trap door access to waste…
Industrial Ultrasonic Cleaner
Ideal for cleanrooms and high-spec environments, this system supports a range of frequencies, 40, 72, and 104 kHz standard, with the flexibility to upgrade to additional options like 80, 120,…
Cleanroom Tables
Material Options: 304L stainless steel, 316L stainless steel, FM-approved PVC-C, or white polypropylene Ultra clean electropolished, polished mirror, or brushed finish stainless steel tops Plastic tops include high-density polyethylene (HDPE),…
Wafer Handling Systems
Specifications Brand- WHS Product Number- WHS-T1 Remarks- *** NOTE: Please specify cassette model number(s) when ordering *** Product description Applications Shipping/receiving area: Wafer transfers are used to move incoming wafers from…
Wafer Transfers
Specifications Brand- WHS Product Number- WHS-T2 Remarks- *** NOTE: Please specify cassette model number(s) when ordering *** Applications Shipping/receiving area: Wafer transfers are used to move incoming wafers from a shipping…
Wafer Aligners
Specifications Brand- WHS Product Number- WHS-A3 Remarks- *** NOTE: Please specify cassette model number(s) when ordering *** Material- Stage: Anti-Static polyoxymethylene - Roller: Anti-Static Polyurethane System- Automatic System Slots- Wafers…
Wafer Escalators / Presenters
Specifications Brand- WHS Product Number- WHS-P1 Size- Automatic System- 76 mm (3”), 100 mm (4”), 150 mm (6”) or 200 mm (8”) Slots- 25-slots Product description Applications Wafer inspection - Wafer…
Wafer Sorters
Specifications Brand- WHS Product Number- WHS-T4 Wafer size- 100 mm (4”), 150 mm (6”) or 200 mm (8”) wafers System- Automatic Slots- 25 Slots Product description Specifications: End Effector: Carbon…
Vacuum Wands
Specifications Brand- WHS Product Number- WHS-V6-1 Product description Applications General use: Vacuum wands are utilized to pick up and transport wafers from one location to another without adding particles. Sorting: For manual…
Wafer / Mask Picks / Openers
Specifications Brand- WHS Product Number- WHS-O3-RSP200 Remarks- Note: We need pod model number when placing your order Pod type- RSP200 (E100) System- Manual system Material, base- Anodized aluminum Material, lid…
Stand Alone Wafer Spinners
The POLOS SPIN4000A is a stand-alone, fully automatic spin coater system. The steel housing guarantees a contamination free work area, and its high-end components ensure a repeatable, programmable spin process…
Table Top Single Wafer Spinners
Unique design The unique outer shell and drain design allows easy switching between table-top and in-deck model. The modular design enables the user to upgrade the unit using a wide…
Hot Plates
Easily convertible into an indeck model Using our specially designed indeck bracket and display bracket, you can easily convert the POLOS® hotplate into an indeck solution. Specifications BrandPOLOSProduct NumberPOLOS-HP200MaterialAluminum (anodized)…
Test Wafers
Specifications Brand- WHS Product Number- WHS-W-601 Material- Bare 5754-H22 aluminum Size- 150 mm (6") Type- With SEMI notch Thickness- 0.8 mm Bare- No finish coating Product description Applications: Training: Aluminum test…
Moisture Barrier Bags
Specifications Brand- WHS Product Number- WHS-B-S600E Remarks- Incl. working stage, gas flushing function and double hot wire sealing bar Material- Stainless Steel Cleanroom designation- ISO 5 (Class 100 FS209E) Product…
Moisture Vacuum Sealer
Key features Writing resolution down to 1.5 µm Adjustable writing field and resolution with exchangeable objectives Compatible with CAD files or bitmap images Compatible with I, h and g-line photoresists Compatible…
Maskless Lithography
The Model MDA-600S is a semi-automatic bench top mask aligner that requires only a square meter of your cleanroom space. (1256 x 1151 x 1600 mm (W*D*H) ). It offers…
Mask Aligners
Benefits Easy operation PC Operation with PLC control Image grab & Data log More than 100 Program recipes Microscope position control system Auto Align mark searching function Specifications BrandMIDASProduct NumberMDA-80FAMax.…
Diaphragm Pumps
Housing machined from a solid PE, PTFE (and conductive) Resistant to almost all chemicals The pump technology allows for particularly gentle material delivery Can be operated at temperatures from -40°C…
Diaphragm Pumps
FEATURES No metal parts SEMI T, H and E No elastomeric O-rings Lubrication-free air motor Cleanroom Class 100 assembled, tested with de-ionized water and double packaged Durable TFM diaphragms, for…
In-Line & Immersion Heaters
Features High efficiency and purity High reliability and low maintenance Compact size for ease of installation No nitrogen purge required SEMI S3, CE and UL compliant Power range: 1.0 -…
In-Line & Immersion Heaters
The heat source is placed in the fluid to reduce heat loss. The heater's low mass and large surface area provide the fastest temperature response time. The system also offers…
Filter Housings
Specifications Brand- ESPRO Product Number- Espro-12-HPFA Material- PFA 440 HP or equivalent Application- Chemical/Acid Max. Working Temp.- 100ºC Product description esPRO’s HPFA-series filter housing is a high-performance solution engineered for high-purity…
Chemical Filters
Specifications Brand- ESPRO Product Number- Espro-12-CMP-PP Material- Multi-layer PP Application- CMP Max. Working Temp.- 80ºC Removal Rating- 0.10 μm Product description esPRO’s CMP-PP Pleated Filter Cartridges utilize advanced patented spin nano…
Wafer Process Cassettes PFA & Custom SST
Specifications Brand ESPRO Product Number esPRO-eM-39-NAT Material PFA TAG 1 2"-8"
Wafer Process Cassettes Al
Specifications Brand- WHS Product Number- WHS-M3 Product description Applications: Bake - Long term thermal bake applications where wafers are left in ovens for multiple days. Thin Wafer Handling - Thin wafer handling…
Wafer Process Cassettes PTFE
It also allows you to select the capacity you wish to process, whilst maximising chemical saturation and flushing to the silicon wafer or substrate. Typical examples would be "standard" carriers…
Wafer Process Cassettes QUARTZ
In close cooperation with our customers, we will develop the quartz boat needed for their process as well as other individual solutions. Specifications BrandESPROProduct NumberesPRO-Custom-QuartzBoatsMaterialQuartz
Shipping Cassettes
Standard Wafer Protection with ePRO Shipping Boxes For standard wafers, which form the backbone of numerous electronic devices, ePRO wafer shipping boxes provide a reliable and efficient shipping solution. These…
