Wafer Process Cassettes Al

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Wafer Process Cassettes Al
  • High Temperature Applications up to 550°
  • Strong, Dimensionally Stable Design
  • SEMI Automation Compliant
  • Scratch Reducing Beveled Slot Design
  • Applications: Bake, Thin Wafer Handling, Thick Wafers, and Ultrasonic and Megasonic
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Specifications

Brand- WHS

Product Number- WHS-M3

Product description

Applications:

  • Bake – Long term thermal bake applications where wafers are left in ovens for multiple days.
  • Thin Wafer Handling – Thin wafer handling where sharp thin wafers cut into plastic cassettes.
  • Thick Wafers – Bonded or thick wafer applications where industry standard plastic cassettes will not work due to slot dimensions.
  • Ultrasonic and megasonic  – cleaning applications where open side wall stainless steel cassettes perform better than soundwave dampening plastic cassettes.

The M3 series is a high temperature stainless steel from 76 (3″) up to 200 mm (8”) diameter wafers. SEMI compliant 25-slot, 8° slot angle in the profile of an industry plastic cassette. Electro polished (EP) type 316 stainless steel.  For thermal automation processing, general bake applications up to 550°C; or mega- and ultra- sonic cleaning applications.