Specifications
Brand- WHS
Product Number- WHS-W-601
Material- Bare 5754-H22 aluminum
Size- 150 mm (6″)
Type- With SEMI notch
Thickness- 0.8 mm
Bare- No finish coating
Product description
Applications:
- Training: Aluminum test wafers are used to train new operators on wafer handling techniques, allowing them to practice and develop their skills before handling more expensive and fragile production wafers.
- Automation Teach: Aluminum wafers are often used to teach robotic movements in automation, allowing engineers to test and refine robotic movements using durable aluminum wafers before moving on to more fragile and expensive silicon wafers.
- Protection: Aluminum wafers can be used as protective electrostatic chuck (PEC) wafers to cover fragile wafer chucks inside a process tool chamber when the tool is undergoing a chamber cleaning cycle, preventing damage to the sensitive chucks during the cleaning process.
The WHS-W-601 is a 150 mm aluminum test wafer, with flat, bare no finish coating, 150 mm (+/-0.1 mm) x 0.8 mm thick, aluminum has been heat treated to make the crystalline structure more resistant to deformation and warping. For use in robot training, wafer handling training, carrier wafer, and for use as an electrostatic chuck cover in chamber cleaning.